W波段64通道相控阵微系统设计与实现

曹佳; 李冠霖; 陈鹏伟; 刘劲松; 李超; 李君

引用本文:	曹佳，李冠霖，陈鹏伟，刘劲松，李超，李君. W波段64通道相控阵微系统设计与实现[J]. 雷达科学与技术, 2022, 20(4): 378-384.[点击复制]
	CAO Jia, LI Guanlin, CHEN Pengwei, LIU Jinsong, LI Chao, LI Jun. Design and Implementation of a 64-Element Phased Array Microsystem in W-Band[J]. Radar Science and Technology, 2022, 20(4): 378-384.[点击复制]

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W波段64通道相控阵微系统设计与实现
曹佳，李冠霖，陈鹏伟，刘劲松，李超，李君
1. 中国航天科工集团防御技术研究院，北京 100039;2. 北京无线电测量研究所，北京 100854;3. 中国科学院微电子研究所，北京 100029

摘要:

相控阵微系统的主要特征是电路与天线的高度融合集成，将三维微纳集成技术和微电子技术紧密地结合在一起，切合相控阵高频化、小型化和低成本的发展需求。本文设计了一款W波段的封装天线相控阵微系统，该相控阵采用硅基三维集成的方式将T/R多功能芯片、天线阵列集成在一个微系统模块中，并详细介绍了基于硅工艺的多功能收发芯片设计和相控阵封装天线设计。给出了相控阵微系统的测试结果。该微系统具有高集成度、高性能、低成本的特点，可以为高速无线通信、高精度探测和成像等应用提供一个较优的技术路径。

关键词: 相控阵微系统多功能收发芯片封装天线 W波段

DOI：DOI:10.3969/j.issn.1672-2337.2022.04.003

分类号:TN402;TN43

基金项目:

Design and Implementation of a 64-Element Phased Array Microsystem in W-Band

CAO Jia, LI Guanlin, CHEN Pengwei, LIU Jinsong, LI Chao, LI Jun

1. Defense Technology Academy of China Aerospace Science and Industry Corporation, Beijing 100039, China;2. Beijing Institute of Radio Measurement, Beijing 100854, China;3. Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

Abstract:

The main feature of the phased-array microsystem is the high integration of circuit and antenna, which closely combines the three-dimensional micro-nano integration and the microelectronics technology to meet the development needs of high frequency, miniaturization and low cost of the phased array. Phased-array microsystem with a packaged antenna operating in the W-band is designed and introduced in this article. The phased array integrates multi-functional chips and antenna together in a microsystem by means of silicon-based three-dimensional integration. The design of the multi-functional transceiver chip and the phased-array packaged-antenna are analyzed. The test results of the phased array microsystem are also provided. The microsystem exhibits the characteristics of high integration, high performance and low cost, paving a technically advantageous path for high data-rate wireless communication, high-precision detection, imaging and other applications.

Key words: phased-array microsystem multi-functional transceiver chip antenna-in-package W band